vestifmИзвестия Национальной академии наук Беларуси. Серия физико-математических наукProceedings of the National Academy of Sciences of Belarus. Physics and Mathematics Series1561-24302524-2415The Republican Unitary Enterprise Publishing House "Belaruskaya Navuka"10.29235/1561-2430-2018-54-1-110-118vestifm-304Research ArticleФИЗИКАPHYSICSЭРОЗИЯ ПОВЕРХНОСТИ МНОГОСЛОЙНЫХ ПЛЕНОК НА ОСНОВЕ НИТРИДОВ ЦИРКОНИЯ И КРЕМНИЯ, ОБЛУЧЕННЫХ ИОНАМИ ГЕЛИЯSURFACE EROSION OF MULTILAYER FILMS BASED ON ZIRCONIUM AND SILICON NITRIDES IRRADIATED WITH HELIUM IONSУгловВ. В.UglovV. V.

доктор физико-математических наук, профессор, заведующий кафедрой физики твердого тела, физический факультет

D. Sc. (Physics and Mathematics), Professor, Head of the Solid State Physics Department of the Physics Faculty

Uglov@bsu.byБелорусский государственный университет, МинскBelarusian State University, Minsk201805042018541110118Copyright © Углов В.В., 20182018Углов В.В.Uglov V.V.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://vestifm.belnauka.by/jour/article/view/304

Работа посвящена исследованию процессов эрозии поверхности многослойных пленок ZrN/SiNx , облученных ионами He (30 кэВ) и отожженных в вакууме при T = 600 °С. Выявлено, что многослойные пленки ZrN/SiNx остаются устойчивыми к образованию блистеров и отшелушиванию при облучении ионами He (30 кэВ) до дозы 8∙1016 см–2. Обнаружено влияние толщины кристаллического и аморфного слоя на характер и степень эрозии поверхности многослойных пленок в результате пострадиационного отжига при T = 600 °С. Обсуждаются возможные механизмы блистеринга и отшелушивания в многослойных системах ZrN/SiNx .

 

The article is devoted to the investigation of surface erosion of ZrN/SiNx multilayer films irradiated with He ions (30 keV) and annealed in vacuum at 600 °C. It was found that multilayer ZrN/SiNx films remain resistant to blistering and flacking when irradiated with He ions (30 keV) up to a dose of 8∙1016 cm–2. The influence of the thickness of the crystalline and amorphous layer on the surface erosion nature and degree of multilayer films as a result of post-radiation annealing at 600 °C are revealed. The possible mechanisms of blistering and flexing in multilayer systems ZrN/SiNx are discussed in the work.

 

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The authors declare that there are no conflicts of interest present.