vestifmИзвестия Национальной академии наук Беларуси. Серия физико-математических наукProceedings of the National Academy of Sciences of Belarus. Physics and Mathematics Series1561-24302524-2415The Republican Unitary Enterprise Publishing House "Belaruskaya Navuka"10.29235/1561-2430-2023-59-3-241-252vestifm-734Research ArticleФИЗИКАPHYSICSСтруктура и микромеханические свойства покрытий TiAlSiN, TiAlSiCN, сформированных методом реактивного магнетронного распыленияThe structure and micromechanical properties of TiAlSiN, TiAlSiCN coatings formed by the method of reactive magnetron sputteringhttps://orcid.org/0000-0002-4489-8751КонстантиновС. В.KonstantinovS. V.

Станислав Валерьевич Константинов, кандидатфизико-математических наук, доцент, старший научный сотрудник

лаборатория элионики

220045

ул. Курчатова, 7

Минск

Stanislav V. Konstantinov, Ph. D. (Physics and Mathematics), Associate Professor, Senior Researcher

Elionics Laboratory

220045

7, Kurchatov Str.

Minsk

svkonstantinov@bsu.byhttps://orcid.org/0000-0001-8292-8942КомаровФ. Ф.KomarovF. F.

Фадей Фадеевич Комаров, академик Национальной академии наук Беларуси, доктор физико-математических наук, профессор, заведующий лабораторией

лаборатория элионики

220045

ул. Курчатова, 7

Минск

Fadei F. Komarov, Academician of the National Academy of Sciences of Belarus, Dr. Sc. (Physics and Mathematics), Professor, Head of the Laboratory

Elionics Laboratory

220045

7, Kurchatov Str.

Minsk

komarovF@bsu.byhttps://orcid.org/0000-0002-4455-2128ЧижовИ. В.ChizhovI. V.

Игорь Викторович Чижов, аспирант

220045

ул. Курчатова, 5

Минск

Igor V. Chizhov, Postgraduate Student

220045

5, Kurchatov Str.

Minsk

igorchizhovwork@gmail.comЗайковВ. А.ZaikovV. A.

Валерий Александрович Зайков, старший научный сотрудник

кафедра физической электроники и нанотехнологий

220045

ул. Курчатова, 5

Минск

Valery A. Zaikov, Senior Researcher

Department of Physical Electronics and Nanotechnologies

220045

5, Kurchatov Str.

Minsk

zaikov@bsu.byИнститут прикладных физических проблем имени А. Н. Севченко Белорусского государственного университетаA. N. Sevchenko Institute of Applied Physical Problems of Belarusian State UniversityБелорусский государственный университетBelarusian State University202303102023593241252Copyright © Константинов С.В., Комаров Ф.Ф., Чижов И.В., Зайков В.А., 20232023Константинов С.В., Комаров Ф.Ф., Чижов И.В., Зайков В.А.Konstantinov S.V., Komarov F.F., Chizhov I.V., Zaikov V.A.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://vestifm.belnauka.by/jour/article/view/734

   Методом реактивного магнетронного распыления сформированы наноструктурированные нитридные TiAlSiN и карбонитридные TiAlSiCN покрытия на различных типах подложек: монокристаллического кремния (100) и титана марки ВТ1-0. Для контроля и управления процессом нанесения покрытий использован разработанный модульный комплекс управления расходом газов (МКУРГ). Проведены исследования элементного состава методом энергодисперсионной рентгеновской спектроскопии (ЭДРС), структуры методом рентгеновской дифракции, морфологии методом сканирующей электронной микроскопии, микромеханических свойств методом наноиндентирования. Установлено, что сформированные покрытия во всем диапазоне параметров α = 0,421–0,605 обладают однофазной структурой (Ti, Al)N, представляющей собой неупорядоченный твердый раствор с гранецентрированной кубической решеткой. Средний размер кристаллитов фазы (Ti, Al)N варьируется в диапазоне (20–30) ± 5 нм. Обнаружено, что уменьшение степени реактивности α от значения α = 0,605 до α = 0,421 приводит к увеличению скорости осаждения нитридных TiAlSiN и карбонитридных TiAlSiСN покрытий на кремниевых подложках на 200–300 %. Твердость сформированных покрытий варьируется в диапазоне H = 28,74–48,99 ГПа, модуль Юнга E = 324,97–506,12 ГПа. Покрытия TiAlSiN, TiAlSiCN демонстрируют высокие показатели индексов ударной вязкости H/E* = 0,07–0,12 и сопротивления пластической деформации H3/E*2 = 0,13–0,72. Установлено, что степень реактивности α оказывает значительное влияние на микромеханические свойства формируемых покрытий. Структура и микромеханические свойства сформированных наноструктурированных нитридных и карбонитридных покрытий TiAlSiN, TiAlSiCN являются пригодными для применения в изделиях космической техники.

   Nanostructured nitride TiAlSiN and carbonitride TiAlSiCN coatings are herein formed by reactive magnetron sputtering on various types of substrates: single-crystal silicon (100) and Titanium Grade2. To control and manage the coating process, the developed modular gas flow control complex (MGFCC) is used. The elemental composition is studied byenergy dispersive X-ray spectroscopy (EDX), the structure by X-ray diffraction (XRD), the morphology by scanning electron microscopy (SEM), whereas the micromechanical properties by nanoindentation. It is discovered that the formed coatings over the entire range of parameters α = 0.421–0.605 have a single-phase structure (Ti,Al)N, which is a disordered solid solution with a face-centered cubic (fcc) lattice. The average crystallite size of the (Ti,Al)N phase varies in the range (20–30) ± 5 nm. It is found that a decrease in the degree of reactivity α from α = 0.605 to α = 0.421 leads to an increase in the rate of deposition of nitride TiAlSiN and carbonitride TiAlSiСN coatings on silicon substrates by 200–300 %. The hardness of the formed coatings varies in the range H = 28.74–48.99 GPa, Young’s modulus E = 324.97–506.12 GPa. TiAlSiN, TiAlSiCN coatings demonstrate high values of impact strength indices H/E* = 0.07–0.12 and plastic deformation resistance indices H3/E*2 = 0.13–0.72. It is detected that the degree of reactivity α has a significant effect on the micromechanical properties of the formed coatings. The structure and micromechanical properties of the formed nanostructured nitride and carbonitride TiAlSiN, TiAlSiCN coatings are suitable for use in space technology applications.

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The authors declare that there are no conflicts of interest present.