vestifmИзвестия Национальной академии наук Беларуси. Серия физико-математических наукProceedings of the National Academy of Sciences of Belarus. Physics and Mathematics Series1561-24302524-2415The Republican Unitary Enterprise Publishing House "Belaruskaya Navuka"10.29235/1561-2430-2024-60-2-162-176vestifm-783Research ArticleФИЗИКАPHYSICSОптические и электрофизические свойcтва нитридных TiAlSiN и карбонитридных TiAlSiCN покрытий: влияние режимов реактивного магнетронного нанесенияOptical and electrophysical properties of nitride TiAlSiN and carbonitride TiAlSiCN coatings: influence of reactive magnetron deposition regimeshttps://orcid.org/0000-0002-4489-8751КонстантиновС. В.KonstantinovS. V.

Константинов Станислав Валерьевич – кандидат физико-математических наук, доцент, ведущий научный сотрудник лаборатории элионики

ул. Курчатова, 7, Минск, 220045

Stanislav V. Konstantinov – Ph. D. (Physics and  Mathematics), Associate Professor, Leading Researcher of the Elionics Laboratory

7, Kurchatov Str., 220045, Minsk

svkonstantinov@bsu.byhttps://orcid.org/0000-0001-8292-8942КомаровФ. Ф.KomarovF. F.

Комаров Фадей Фадеевич – академик Национальной академии наук Беларуси, доктор физико-математических наук, профессор, заведующий лабораторией элионики

ул. Курчатова, 7, Минск, 220045

Fadei F. Komarov – Academician of the National Academy of Sciences of Belarus, Dr. Sc. (Physics and  Mathematics), Professor, Head of the Elionics  Laboratory

7, Kurchatov Str., 220045, Minsk

komarovF@bsu.byhttps://orcid.org/0000-0002-4455-2128ЧижовИ. В.ChizhovI. V.

Чижов Игорь Викторович – аспирант

ул. Курчатова, 5, 220045, Минск

Igor V. Chizhov – Postgraduate Student

5, Kurchatov Str., 220045, Minsk

igorchizhovwork@gmail.comЗайковВ. А.ZaikovV. A.

Зайков Валерий Александрович – старший научный сотрудник кафедры физической электроники и нанотехнологий

ул. Курчатова, 5, 220045, Минск

Valery A. Zaikov – Senior Researcher at the Department of Physical Electronics and Nanotechnologies

5, Kurchatov Str., 220045, Minsk

zaikov@bsu.byИнститут прикладных физических проблем имени А. Н. Севченко Белорусского государственного университетаA. N. Sevchenko Institute of Applied Physical Problems of Belarusian State UniversityБелорусский государственный университетBelarusian State University202410072024602162176Copyright © Константинов С.В., Комаров Ф.Ф., Чижов И.В., Зайков В.А., 20242024Константинов С.В., Комаров Ф.Ф., Чижов И.В., Зайков В.А.Konstantinov S.V., Komarov F.F., Chizhov I.V., Zaikov V.A.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://vestifm.belnauka.by/jour/article/view/783

Актуальной является разработка тонкопленочных терморегулирующих покрытий для малых космических аппаратов. Покрытия на основе нитрида титана, в силу своей высокой устойчивости к облучению высокоэнергетическими частицами и термоциклированию, способны функционировать в неблагоприятных условиях ближнего и дальнего космоса. Методом реактивного магнетронного распыления сформированы наноструктурированные покрытия TiAlSiN, TiAlSiCN на подложках из оксида кремния SiO2, ситалла CT-1 и монокристаллического кремния Si(100). Проведено исследование электрофизических и оптических свойств сформированных покрытий. Покрытия демонстрируют хорошую отражательную способность в инфракрасном диапазоне спектра (700–2000 нм), что важно для снижения нагрева космического аппарата (КА) под воздействием прямых солнечных лучей. В видимом диапазоне (400–700 нм) наблюдается низкий уровень суммарного Rсумм отражения. Это перспективно для спутников, предназначенных для наблюдений поверхности Земли. Получены значения коэффициентов солнечного поглощения αs и коэффициентов переизлучения ε0, отношения αs/ε0, а также равновесной температуры Tр для исследуемых образцов. Определены величины удельного Rуд и поверхностного R□ электросопротивления, концентрации электронов N и подвижности электронов μ. Установлено, что пленки TiAlSiN, TiAlSiCN являются электропроводящими: Rуд TiAlSiN = (92÷4260) ∙ 10–7 Ом ∙ м, RудTiAlSiCN = (51÷2360) ∙ 10–7 Ом ∙ м. Обнаружено, что добавление углерода в состав покрытия снижает их электросопротивление. Полученные наноструктурированные покрытия нитрида TiAlSiN и карбонитрида TiAlSiCN представляют интерес для использования их в качестве структурных элементов терморегулирующих систем для малых космических аппаратов.

The development of thin-film thermal control coatings for small spacecraft is relevant. Coatings based on titanium nitride are capable of functioning in unfavorable conditions of near and deep space, due to their high resistance to the irradiation by high-energy particles. Using the reactive magnetron sputtering method, the nanostructured TiAlSiN and TiAlSiCN coatings were formed on the substrates of silicon oxide (SiO2), glass-ceramic CT-1 and single-crystalline silicon (Si(100)). A study of the electrophysical and optical properties of the formed coatings was carried out. The deposited coatings demonstrate a good reflectivity in the infrared range of spectrum (700–2000 nm), what is important for reducing the overheating of the spacecraft (SC) under the influence of the direct sunlight. In the visible range of spectrum (400–700 nm), a low level of total Rtotal reflection is observed. This is promising for satellites designed to observe the Earth’s surface. The values of solar absorption coefficients αs, emissivity coefficients ε0, ratios αs/ε0, as well as the equilibrium temperature Tр for the samples under study were obtained. The values of resistivity ρ and surface resistance R□, electron concentration N and electron mobility μ were determined. It has been discovered that TiAlSiN, TiAlSiCN films are electrically conductive: ρTiAlSiN = (92÷4260) ∙ 10–7 Ω ∙ m, ρTiAlSiCN = (51÷2360) ∙ 10–7 Ω ∙ m. It has been found that adding carbon to the coating composition reduces the resistance. The obtained nanostructured coatings of TiAlSiN nitride and TiAlSiCN carbonitride can be used as temperature control coatings for small spacecrafts.

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The authors declare that there are no conflicts of interest present.