ELECTRICALLY CONDUCTING STRUCTURES IN LASER-MODIFIED DIAMOND-LIKE CARBON FILMS
Abstract
Modification of diamond-like carbon (DLC) films by pulsed laser radiation with a wavelength of 532 nm and a pulse duration of 18 ns was investigated. Irradiation of DLC films with laser fluence over 0.4 J/cm2 was accompanied by the formation of electrically conducting structures with a surface resistance varying from thousands to a kΩ/sq. The dependence of conductivity of films on the laser fluence was established. A relationship between the energy density of laser radiation and the structural changes in films, their heating and evaporation is discussed.
About the Authors
A. N. Chumakov
B. I. Stepanov Institute of Physics of the National Academy of Sciences of Belarus, Minsk
Belarus
Belarus
I. S. Nikonchuk
B. I. Stepanov Institute of Physics of the National Academy of Sciences of Belarus, Minsk
Belarus
Belarus
N. A. Poklonski
Belarusian State University, Minsk
Belarus
Belarus
N. I. Gorbachuk
Belarusian State University, Minsk
Belarus
Belarus
О. N. Poklonskaya
Belarusian State University, Minsk
Belarus
Belarus
V. Е. Obukhov
The Physical-Engineering Institute of the NAS of Belarus, Minsk
Belarus
Belarus
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