SURFACE EROSION OF MULTILAYER FILMS BASED ON ZIRCONIUM AND SILICON NITRIDES IRRADIATED WITH HELIUM IONS
https://doi.org/10.29235/1561-2430-2018-54-1-110-118
Abstract
The article is devoted to the investigation of surface erosion of ZrN/SiNx multilayer films irradiated with He ions (30 keV) and annealed in vacuum at 600 °C. It was found that multilayer ZrN/SiNx films remain resistant to blistering and flacking when irradiated with He ions (30 keV) up to a dose of 8∙1016 cm–2. The influence of the thickness of the crystalline and amorphous layer on the surface erosion nature and degree of multilayer films as a result of post-radiation annealing at 600 °C are revealed. The possible mechanisms of blistering and flexing in multilayer systems ZrN/SiNx are discussed in the work.
About the Author
V. V. Uglov
Belarusian State University, Minsk
Belarus
D. Sc. (Physics and Mathematics), Professor, Head of the Solid State Physics Department of the Physics Faculty
Belarus
D. Sc. (Physics and Mathematics), Professor, Head of the Solid State Physics Department of the Physics Faculty
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