SURFACE EROSION OF MULTILAYER FILMS BASED ON ZIRCONIUM AND SILICON NITRIDES IRRADIATED WITH HELIUM IONS
https://doi.org/10.29235/1561-2430-2018-54-1-110-118
Abstract
The article is devoted to the investigation of surface erosion of ZrN/SiNx multilayer films irradiated with He ions (30 keV) and annealed in vacuum at 600 °C. It was found that multilayer ZrN/SiNx films remain resistant to blistering and flacking when irradiated with He ions (30 keV) up to a dose of 8∙1016 cm–2. The influence of the thickness of the crystalline and amorphous layer on the surface erosion nature and degree of multilayer films as a result of post-radiation annealing at 600 °C are revealed. The possible mechanisms of blistering and flexing in multilayer systems ZrN/SiNx are discussed in the work.
About the Author
V. V. Uglov
Belarusian State University, Minsk
Belarus
D. Sc. (Physics and Mathematics), Professor, Head of the Solid State Physics Department of the Physics Faculty
Belarus
D. Sc. (Physics and Mathematics), Professor, Head of the Solid State Physics Department of the Physics Faculty
References
1. Zinkle S. J., Was G. S. Materials challenges for advanced nuclear energy. Acta Materialia, 2013, vol. 61, pp. 735–758. Doi:10.1016/j.actamat.2012.11.004
2. Uglov V. V., Abadias G., Zlotski S. V., Michel A., Saladukhin I. A., Leshkevich S. S., Gaiduk P. I., Jasulaitene V. Ion-induced changes in the structure and phase composition of nanocrystalline TiZrSiN coatings formed via magnetron sputtering. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2015, vol. 9, no. 5, pp. 995–1004. Doi: doi. org/10.1134/S1027451015050420
3. Janse Van Vuuren A., Neethling J. H., Skuratov V. A., Uglov V. V., Petrovich S. The effect of He and swift heavy ions on nanocrystalline zirconium nitride. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2014, vol. 326, pp. 19–22. Doi: 10.1016/j.nimb.2013.10.063
4. Grimes R. W., Konings R. J. M., Edwards L. Greater tolerance for nuclear materials. Nature Materials, 2008, vol. 7, no. 9, pp. 683–685. Doi: 10.1038/nmat2266
5. Uglov V. V., Safronov I. V., Kvasov N. T., Remnev G. E., Shimanski V. I. The Interface Influence in TiN/SiNx Multilayer Nanocomposite Under Irradiation. Russian Physics Journal, 2018, vol. 60, no. 9, pp. 600–1610. Doi: 10.1007/s11182-018-1257-1
6. Misra A., Demkowicz M., Zhang X., Hoagland R. The radiation damage tolerance of ultra-high strength nanolayered composites. JOM, 2007, vol. 59, pp. 62–65. Doi: 10.1007/s11837-007-0120-6
7. Demkowicz M. J., Anderoglu O., Zhang X., Misra A. The influence of Σ3 twin boundaries on the formation of radiation-induced defect clusters in nanotwinned Cu. Journal of Materials Research, 2011, vol. 26, no. 14, pp. 1666–1675. Doi: 10.1557/jmr.2011.56
8. Zhang J. Y., Wang Y. Q., Liang X. Q., Zeng F. L., Liu G., Sun J. Size-dependent He-irradiated tolerance and plastic deformation of crystalline/amorphous Cu/Cu–Zr nanolaminates. Acta Materialia, 2015, vol. 92, pp. 140–151. Doi: 10.1016/j. actamat.2015.03.055
9. Yu K. Y., Liu Y., Fu E. G., Wang Y. Q., Myers M. T., Wang H., Shao L., Zhang X. Comparisons of radiation damage in He ion and proton irradiated immiscible Ag/Ni nanolayers. Journal of Nuclear Materials, 2013, vol. 440, no. 1–3, pp. 310–318. Doi: 10.1016/j.jnucmat.2013.04.069
10. Uglov V. V., Abadias G., Zlotski S. V., Saladukhin I. A., Safronov I. V., Shymanski V. I., Janse van Vuuren A., O’Connelle J., Skuratov V., Neethling J. H. Features of microstructure of ZrN, Si3N4 and ZrN/SiNx nanoscale films irradiated by Xe ions. Vacuum, 2017, vol. 143, pp. 491–494. Doi: 10.1016/j.vacuum.2017.03.015
11. Agarwal S., Trocellier P., Serruys Y., Vaubaillon S., Miroa S. Helium mobility in advanced nuclear ceramics. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2014, vol. 327, pp. 117–120. Doi: 10.1016/j.nimb.2013.09.039
12. Zinkle S.J. Effect of H and He irradiation on cavity formation and blistering in ceramics. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2012, vol. 286, pp. 4–19. Doi: 10.1016/j. nimb.2012.03.030
13. Uglov V. V. Radiation effects in solids. Minsk, Belarusian State University Publ., 2011. 207 p. (in Russian).
14. Uglov V. V. Radiation processes and phenomena in solids. Minsk, Vysheishaya shkola Publ., 2016. 188 p. (in Russian).
15. Liu Z. J., Jiang N., Shen Y. G., Li X. N. Stress-induced surface damages in Ti-Si-N films grown by magnetron sputtering. Thin Solid Films, 2008, vol. 516, no. 21, pp. 7609–7614. Doi: 10.1016/j.tsf.2008.04.090
16. He M. Y., Evans A. G., Hutchinson J. W. Effects of morphology on the decohesion of compressed thin films. Materials Science and Engineering: A, 1998, vol. 245, no. 2, pp. 168–181. Doi: 10.1016/S0921-5093(97)00848-4
17. Abadias G., Uglov V. V., Saladukhin I. A., Zlotski S. V., Tolmachova G., Dub S. N., Janse van Vuuren A. Growth, structural and mechanical properties of magnetron-sputtered ZrN/SiNx nanolaminated coatings. Surface and Coatings Tech-no logy, 2016, vol. 308, pp. 158–167. Doi: 10.1016/j.surfcoat.2016.06.099
18. Interactions of ions with matter. Available at: www.srim.org.
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